Semiconductor Material And Device Characterization Third Edition

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Edition: 3rd · ISBN: 9780471739067 · Author: Schroder · Publisher: John Wiley & Sons, Incorporated · Formats: Hardcover, BryteWave Format · Copyright Year: 2006 ...

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CORONA-OXIDE-SEMICONDUCTOR device CHARACTERIZATION

We describe a novel contactless semiconductor characterization technique capable of determining a number of semiconductor material and device parameters.

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This paper presents a detailed analysis of multiple Lithography methodologies as a means for advanced integrated circuit development.