Analysis of X|ray reflectivity from sputtered carbon thin films

Analysis of X-ray reflectivity from sputtered carbon thin films (1 ... - KEK

Analysis of X-ray reflectivity from sputtered carbon thin films. (1) Consideration of density gradient. Mari MIZUSAWA and Kenji SAKURAI. *. National Institute ...

Analysis of X-ray reflectivity from sputtered carbon thin films (2 ... - KEK

This report describes the wavelet transform of X-ray reflectivity data from a carbon thin film sputtered on a Si wafer [2]. Theoretical Background. The wavelet ...

(PDF) X-Ray Reflectivity Analysis in Evaluating Multilayer Thin Film ...

X-ray reflectivity technique is applied in evaluation of deposition of multilayer thin film fabrication process.

X-Ray Reflectivity Analysis in Evaluating Multilayer Thin Film ...

Deposition process carried out by radio frequency (RF) magnetron sputtering of 99% purity of silicon carbide (SiC) and carbon (C) as a target.

Density and microstructure of a-C thin films - ScienceDirect

Often, x-ray reflectivity (XRR) has been used to measure the density of carbon thin films. From the present work, we find that the determination of density of ...

Characterization of sputtered nickel/carbon multilayers with soft-x ...

Schiller, “Interface analysis of sputtered W-C, Rh-C and Ni-C multilayers for soft x-ray ap- plications,” Thin Solid Films 175, 161–171 ~1989!. 4. M. P. Bruijn, ...

X-ray specular reflectivity profile for sputtered a -C, diamondlike a...

X-ray specular reflectivity profile for sputtered a -C, diamondlike a -C:H, polymeric a -C:H and cluster-assembled films. Their electron density is lower ...

Study of thin film multilayers using X-ray reflectivity and scanning ...

Grazing incidence X-ray reflectivity is a powerful technique to obtain structural and chemical information of thin single/multilayer films as a function of ...

Characterization of sputtered nickel/carbon multilayers with soft-x ...

Theoretically, at this energy a maximum peak reflectivity of ∼46% can be achieved at normal incidence.[1] Interface roughnesses, interdiffusion, and layer ...

Structural Analysis of DLC Thin Film Using X-Ray Reflectivity ... - OUCI

The samples were deposited by RF magnetron sputtering and analyzed using Raman spectroscopy and X-ray reflectivity (XRR) methods. Different parameters of ...

X-Ray Reflectivity of Ultra-Thin Diamond-Like Carbon Films

Grazing incidence x-ray reflectivity has been employed to investigate ultra-thin films of tetrahedral amorphous carbon (ta-C) grown with an ...

Structural analysis of DLC thin film using x-ray reflectivity and ...

The characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in ...

Back-to-Basics tutorial: X-ray diffraction of thin films

The aim of this article is to ultimately lower the barrier for researchers to perform meaningful XRD analysis, and, building on this foundation, ...

Optical Properties of Amorphous Carbon Thin Films Fabricated ...

This paper reports the results of amorphous carbon thin films fabricated by using the gas-impulse-injection magnetron-sputtering method and ...

X-Ray Reflectivity of Ultra-Thin Diamond-Like Carbon Films - DTIC

outer surface, so that the film density is derived from analysis of the oscillations of the post- critical angle reflectivity. SAMPLE PREPARATION. The ta-C ...

Low resistivity amorphous carbon-based thin films employed ... - HAL

Amorphous carbon-based coatings deposited on copper substrates by magnetron sputtering at different tar- get-to-substrate distances were ...

X-ray reflectivity study of tetrahedral amorphous carbon films

The influences of different depositions bias voltages on the microstructure and the properties of thin tetrahedral amorphous carbon (ta-C) films ...

X-ray thin-film measurement techniques

In this section, the analysis of the resulting X-ray reflectivity curve to obtain information on the structural parameters of a thin film is described. 2.2.1.

Structural Investigations of HiPIMS-deposited Diamond-Like Carbon ...

Film density was determined using X-Ray Reflectivity (XRR) and chemical composition using Elastic Recoil Detection Analysis (ERDA). The compressive stresses of ...

Resonant soft x-ray reflectivity of organic thin films - AIP Publishing

Experiments and simulations show that RSoXR has a strong and controllable contrast near the carbon K edge and that polymer thin film properties ...