Events2Join

Density Measurement of Thin Sputtered Carbon Films


Density Measurement of Thin Sputtered Carbon Films

Density Measurement of Thin Sputtered Carbon Films - Volume 32.

DENSITY MEASUREMENT OF THIN SPUTTERED CARBON FILMS

The densities of sputtered thin carbon films have been determined using a novel. X-ray technique. This nondestructive method involves the measurement of the.

Density and microstructure of a-C thin films - ScienceDirect

From the present work, we find that the determination of density of carbon thin films, especially those with a thickness of few tens of nm, may not be accurate ...

Density measurement of thin-films for micro-electromechanical ...

It has been noted, for example, that the density of thin carbon films is highly dependent on preparation conditions [1], [2]. This has also been seen for “spin- ...

Density and Microstructure of Amorphous Carbon Thin Films - arXiv

Often, x-ray reflectivity (XRR) has been used to measure the density of carbon thin films. From the present work, we find that determination of ...

On the film density using high power impulse magnetron sputtering

The density values were measured and compared with results from thin films grown under equivalent conditions using DCMS in addition to tabulated bulk values.

The measurement of the thickness of thin carbon films - ResearchGate

A nearly linear relationship has been found to exist between the optical density and the thickness of evaporated carbon films. The determination of film ...

Carbon Thin Film Deposition Using High Power Pulsed Magnetron ...

Carbon film densities up to 2.7 g/cm3 have been measured. The density is significantly in- creased compared to films grown by PECVD (2.1 g/cm3) or. D.C. sputter ...

Density of amorphous sputtered Ge 2 Sb 2 Te 5 thin films

The studies conducted to date have determined the density by x-ray reflectometry (XRR) performed on films deposited by sputtering at room ...

Optical Properties of Amorphous Carbon Thin Films Fabricated ...

This paper reports the results of amorphous carbon thin films fabricated by using the gas-impulse-injection magnetron-sputtering method and ...

Sputter Deposition of Amorphous Carbon Thin Films in Argon, Neon ...

... measured from this and similar curves and used for further analysis. Figure 4.10: Raman spectrum of a measured a-C thin film deposited at a power density of.

Density and Microstructure of a -C Thin Films | Request PDF

We did precise density measurements using time of flight (ToF) neutron reflectivity (NR), a technique seldom used to study carbon thin films. We amply ...

Amorphous carbon thin films: Mechanisms of hydrogen ...

For overall relative D/H amounts between 11% and 47% in the discharge gas, the SEYmax increases almost linearly from 0.99 to 1.38. An abrupt ...

Low resistivity amorphous carbon-based thin films employed ... - HAL

Amorphous carbon-based coatings deposited on copper substrates by magnetron sputtering at different tar- get-to-substrate distances were ...

SPUTTERED AMORPHOUS CARBON FILMS

SE data analysis provides: (i) the sp3 and sp2 volume fractions and (ii) the optical properties, that are combined well with the density, the internal stresses ...

Amorphous carbon coatings with controlled density and composition

RBS measurements were used to calculate the film density and were compared to ... [23] Tribological behavior of diamond-like carbon thin films ...

Density and microstructure of a -C thin films - Semantic Scholar

Deposition and characterization of amorphous carbon thin film by thermal CVD · Effect of heat treatment on microstructures of magnetron sputtered ...

Density dependence of the electrochemical characteristics of carbon ...

... carbon overcoats as a corrosion barrier for thin film media has been studied. The sputtering pressure and power used during the deposition of the carbon ...

12 - OUCI

From scanning transmission electron microscopy images, two film structures were observed. Films with a density higher than ≈40% of the bulk density exhibit a ...

Density, sp3 fraction, and cross-sectional structure of amorphous ...

... thin amorphous carbon films: Accurate determination of the plasmon energy ... density changes due to the annealing of sputtered amorphous carbon (a-C) films.