Effect of anode bias on plasma confinement in direct current ...

Here we report a Langmuir probe study of the dependence of plasma density and plasma potential on anode bias for dc magnetron sputtering. We find that positive ...

Effect of anode bias on plasma confinement in direct current magnetron discharges · Article PDF first page preview · Citing articles via · Submit ...

Effect of anode bias on plasma confinement in direct current ...

Effect of anode bias on plasma confinement in direct current magnetron discharges ; Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films · 12 · 3.

Effect of anode bias on plasma confinement in direct current ...

Semantic Scholar extracted view of "Effect of anode bias on plasma confinement in direct current magnetron discharges" by J. Doyle et al.

Response of the plasma to the size of an anode electrode biased ...

Trends in the plasma parameters such as the collected current den- sity, plasma potential, electron density, electron temperature and optical ...

Plasma Potential - an overview | ScienceDirect Topics

They observe a gradual increase of dc self-bias versus electrode distance much like the one presented here, but only above a certain value of L. They attribute ...

Response of the plasma to the size of an anode electrode biased ...

When electron collection at the anode is weak or moderate, one has typically, DV ¼ V p À V a < 0. In most cases, however, the electron thermal currents are much ...

Theory and simulation of electron sheaths and anode spots in low ...

No sheath is present in this regime, instead the plasma remains quasineutral up to the electrode. Once the bias exceeds the plasma potential an electron sheath ...

Structural transformation of dusty plasma crystal in dc discharge ...

[32] in the DPEx device and adapted in recent publications [23,33,34]. The asymmetry in the electrode configuration with a longer cathode area ...

Near anode plasma in the plasma interaction facility at UCLA

Electric Propulsion Conference, Washington DC, 2013. 10SJ Araki and RE Wirz. Particle Simulation of Near-Surface Cusp Confinement of Weakly Ionized Plasma. In ...

Continuum kinetic investigation of the impact of bias potentials in the ...

within the plasma, the inclusion of a bias potential causes a current to ... 2(a), the poten- tial difference at the anode remains relatively constant with bias ...

Alternative anode geometry for magnetron sputtering - ScienceDirect

The ring anodes affect the discharge impedance by changing the plasma confinement. In the system studied, the impedance decreases (compared to CMS) when the ...

Chapter 1 Introduction

However, the ion bombardment effect on the cathode is expected in such high voltage DC plasma. Accordingly, secondary electron emission (SEE) from the IEC.

Investigations of Ion Confinement by Direct Current Coaxial Glow ...

The plasma is formed inside the cylindrical grid cathode. The discharge current-voltage characteristic curves and Paschen curve are obtained at different gas ...

The Importance of DC Self-Bias Voltage in Plasma Applications

In reactive ion etching (RIE) plasma processes, the parameter known as DC self-bias voltage is an important “control knob” for the ion energy.

(PDF) Anode effects in magnetron sputtering - ResearchGate

For a small anode, the positive potential reaches values high enough for an anode plasma to appear. Localized anode plasmas act as ion sources. The ions drift ...

Effect of anode bias on plasma confinement in direct current

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Adjusting DC bias voltage in plasma chamber - Google Patents

A method of adjusting the cathode DC bias in a plasma chamber for fabricating semiconductor devices. A dielectric shield is positioned between the plasma ...

Effect of Secondary Electron Emission on Electron Cross-Field ...

magnetized plasma is to apply a dc bias voltage (Vb ~10-104. V) between two ... Staack, and N. J. Fisch,. “Effects of segmented electrodes in Hall current plasma.

Enhanced Confinement with Plasma Biasing in the MST Reversed ...

profile is present during plasma biasing. Floating potential has ... any direct effect on energy confinement. In MST, global magnetic ...