Monocrystalline Silicon Carbide Disk Resonators on Phononic ...

Micromechanical resonators with ultra-low energy dissipation are essential for a wide range of applications, such as navigation in ...

ultra-high q monocrystalline silicon carbide disk resonators ...

This work introduces a 3D design incorporating a phononic crystal to decouple a centrally-supported silicon carbide bulk acoustic wave disk resonator from its ...

(PDF) Monocrystalline Silicon Carbide Disk Resonators on ...

The SiC disk resonators are anchored upon an acoustically-engineered Si substrate containing a phononic crystal which suppresses anchor loss and promises ...

High-Q monocrystalline silicon carbide disk resonators fabricated ...

This paper presents, for the first time, high-Q bulk acoustic wave (BAW) modes in disk resonators fabricated using deep reactive ion etching (DRIE) of ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic ...

The SiC disk resonators are anchored upon an acoustically-engineered Si substrate containing a phononic crystal which suppresses anchor loss and promises Q

Monocrystalline Silicon Carbide Disk Resonators on Phononic ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes. Benoit Hamelin 1. ,. Jeremy Yang 2.

ULTRA-HIGH Q MONOCRYSTALLINE SILICON CARBIDEDISK ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes. Article. Full-text available. Dec 2019.

SILICON CARBIDE PHONONIC CRYSTAL CAVITIES FOR ...

Microfabricated high-Q phononic crystal cavity resonators provide a lower power small-footprint, CMOS-compatible alternative to. Surface Acoustic Wave (SAW), ...

‪Jeremy Yang‬ - ‪Google Scholar‬

Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes. B Hamelin, J Yang, A Daruwalla, H Wen, ...

Spin-acoustic control of silicon vacancies in 4H silicon carbide

Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes. Sci. Rep. 9, 18698 ...

Integrated Ultra-High Q Bulk Acoustic Wave Resonators in Thick ...

Ayazi, “Monocrystalline Silicon. Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk. Acoustic Wave Modes,” Scientific Reports, vol ...

‪Jeremy Yang‬ - ‪Google Scholar‬

Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes. B Hamelin, J Yang, A Daruwalla, H Wen, ...

a high-q solid disk baw gyroscope in monocrystalline 4h silicon

803119. [10] B. Hamelin et al., “Monocrystalline Silicon Carbide Disk. Resonators on Phononic Crystals with Ultra-Low Dissipation. Bulk Acoustic Wave Modes ...

Monocrystalline 4H Silicon Carbide-on-Insulator Substrates for Nav ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes · B. HamelinJeremy YangA. DaruwallaH ...

PIEZOELECTRIC SINGLE CRYSTAL 6H SILICON CARBIDE ...

Piezoelectrically driven and sensed single-crystalline 6H silicon carbide (SiC) microelectromechanical resonators were ... [3] “6H-SiC microdisk torsional ...

Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk ...

... disk resonators. We compare (00 01) 4H-SiC to (111) Si, another in-plane isotropic material and validate (0 001) 4H-SiC's superior ...

‪Benoit Hamelin‬ - ‪Google 學術搜尋‬

Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes. B Hamelin, J Yang, A Daruwalla, H Wen, ...

Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

H. Wen. , and. F. Ayazi. , “. Monocrystalline silicon carbide disk resonators on phononic crystals with ultra- ...

SILICON CARBIDE PHONONIC CRYSTAL CAVITIES FOR ...

Microfabricated high-Q phononic crystal cavity resonators provide a lower power small-footprint, CMOS-compatible alternative to. Surface Acoustic Wave (SAW), ...

Epitaxial bulk acoustic wave resonators as highly coherent multi ...

The GaN/NbN/SiC epi-HBAR is an electrically actuated, multi-mode phonon source that can be directly interfaced with NbN-based superconducting qubits or SiC- ...