Research on Subsurface Damage Measurement of Fused Silica in ...

The correlation between surface roughness and subsurface damage depth in ultra-precision grinding based on laser damage performance is established using curve ...

Subsurface damage measurement of ground fused silica parts by ...

We herein detail a new principle of SSD measurement based on the utilization of HF acid etching. We also review and compare different subsurface damage (SSD) ...

The maximum depth of subsurface damage can be predicted by measuring the Ra value, by which accurate prediction of defect depth in ultra- ...

Subsurface damage model in single and double scratching of fused ...

The results show that the radial, cone, median, and lateral cracks are coexistent in fused silica. The second scratching leads to an increase in the fracture ...

Study on the destructive measurement of subsurface damage for ...

In this paper, based on fused silica mirror as the experimental object, free abrasives of W28 size are used to grind the mirror blank, then two destructive ...

Subsurface damages of fused silica developed during deterministic ...

The SSD depth induced by pitch and polyurethane pads (with rough abrasive) ranges from 0.77 to 1.49μm (~1/7-1/5 of abrasive size). High pressure ...

Theoretical model and digital extraction of subsurface damage in ...

To verify the model and method, many fused silica samples are ground under different processing parameters, and their SSD depth and roughness Rz ...

[PDF] Subsurface damage measurement of ground fused silica parts ...

A new principle of SSD measurement based on the utilization of HF acid etching is detailed, which demonstrates good concordance between the different ...

Methods for Detection of Subsurface Damage: A Review

Subsurface damage measurement of ground fused ... Application of total internal reflection microscopy for laser damage studies on fused silica.

Study on the Destructive Measurement of Subsurface Damage for ...

In this paper, two destructive measurement methods of subsurface damage for fused silica mirror are studied. Based on fused silica mirror as the ...

Subsurface damage measurement of ground fused silica ... - PubMed

Detection and measurement of subsurface damage of ground optical surfaces are of major concern in the assessment of high damage thresholds ...

Sub-surface mechanical damage distributions during grinding of ...

2.3 Measurement of fused silica indentation parameters. On a separate ... Steele, “The distribution of subsurface damage in fused silica”, SPIE 5991, Boulder ...

Simulation and experimental research on subsurface damage of ...

A finite element model of silicon nitride grinding was created based on virtual abrasives with a truncated polyhedral shape, to simulate the subsurface ...

Evaluating subsurface damage in optical glasses | Lee

These techniques based on different mechanisms provide researchers with invaluable information on the subsurface damage in various materials. In this article ...

A review of subsurface damage detection methods for optical ...

Subsurface damage (SSD) induced during the processing of optical components, which are key parts of large optical systems, can deteriorate ...

Rapid Detection and Elimination of Subsurface Mechanical Damage ...

The first step involves polishing and grinding the fused silica samples in a traditional manner. A technique known as reactive ion beam etching (RIBE) is then ...

Methods for Detection of Subsurface Damage: A Review

Subsurface damage measurement of ground fused silica ... Application of total internal reflection microscopy for laser damage studies on fused silica.

Analysis of subsurface damage during fabrication process and its ...

In this study, we made several groups of samples of fused silica with different surface roughness, and manage to detect the positions and depths of the SSDs via ...

Evaluating subsurface damage in optical glasses

The recently developed chemical etching method measures the variations in surface roughness of ground fused silica with the etching time or ...

[PDF] The distribution of subsurface damage in fused silica

163 Citations · MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique · Influence of Cutting ...