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ultra|high q monocrystalline silicon carbide disk resonators ...


ultra-high q monocrystalline silicon carbide disk resonators ...

ULTRA-HIGH Q MONOCRYSTALLINE SILICON CARBIDE DISK RESONATORS. ANCHORED UPON A PHONONIC CRYSTAL. Jeremy Yang, Benoit Hamelin, Seung-Deok Ko, and Farrokh Ayazi.

High-Q monocrystalline silicon carbide disk resonators fabricated ...

This paper presents, for the first time, high-Q bulk acoustic wave (BAW) modes in disk resonators fabricated using deep reactive ion etching (DRIE) of ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic ...

Navigation-grade inertial measurement units (IMUs) contain multiple ultra-high Q gyroscopes, accelerometers and clocks and will directly benefit ...

High-Q monocrystalline silicon carbide disk resonators fabricated ...

High-Q monocrystalline silicon carbide disk resonators fabricated using drie of thick SiC-on-insulator substrates · No full-text available · Citations (12) ...

4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q ...

... silicon carbide, specifically its monocrystalline ... high Q of 18 million in a solid 4H-SiC disk resonator. ... silicon carbide disk resonant gyroscope. c, a ...

a high-q solid disk baw gyroscope in monocrystalline 4h silicon

Some recent works have shown that m=3 modes of capacitive disk resonators in 4H-SiC exhibit ultra-low dissipation levels (Q > 3×106), and as-born frequency ...

(PDF) Monocrystalline Silicon Carbide Disk Resonators on ...

Si handle layer can support an array of ultra-high Q SiC resonators while maintaining the die's footprint. Navigation-grade inertial measurement units (IMUs) ...

Monocrystalline Silicon Carbide Disk Resonators - ProQuest

Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes ... high quality-factors (Q) in ...

High Q SiC microresonators - Optica Publishing Group

We demonstrate a 20 μm radius suspended microring resonator with Q=14,100 fabricated on commercially available SiC-on-silicon substrates. © 2013 Optical Society ...

High-Q microresonators on 4H-silicon-carbide-on-insulator platform ...

The Q factor and nonlinear optical properties of the fabricated 4H-SiC microdisk resonators were examined with the measurement setup shown in ...

High-quality integrated microdisk resonators in the visible-to-near ...

High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform.

‪Jeremy Yang‬ - ‪Google Scholar‬

2021. Ultra-high Q monocrystalline silicon carbide disk resonators anchored upon a phononic crystal. J Yang, B Hamelin, SD Ko, F Ayazi. Hilton Head, 83-86 ...

Integrated Ultra-High Q Bulk Acoustic Wave Resonators in Thick ...

Ayazi, “High-Q monocrystalline silicon carbide disk resonators fabricated using drie of thick SiC-on-insulator substrates,” in 2018. IEEE Micro Electro ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic ...

Ultra-High Q Monocrystalline Silicon Carbide disk Resonators Anchored Upon a Phononic Crystal. In 2018 Solid State Sensor, Actuator Microsystems Work, 83–86 ...

Highly-doped SiC resonator with ultra-large tuning frequency range ...

The advances in the growth of single crystalline cubic silicon carbide on silicon at low cost and high quality for resonator applications was used.

a high-q solid disk baw gyroscope in monocrystalline 4h silicon ...

This paper demonstrates, for the first time, a solid disk capacitive bulk-acoustic wave (BAW) gyroscope in monocrystalline 4H-SiC, with a promising angle ...

4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q ...

... silicon carbide, specifically its monocrystalline ... Disk Resonator Gyroscope. Zhang W., Yin L., Wang Y ... SiC Using Ultra-High Q Bulk Acoustic Wave Resonators.

High-Q suspended optical resonators in 3C silicon carbide obtained ...

Suspended SiC photonic structures, such as waveguides, micro-disks [29–31] and photonic crystal cavities [32–36] are of interest for opto- ...

Ultralow Dissipation Nanomechanical Devices from Monocrystalline ...

Klas, High Q nanomechanical resonators fabricated from crystalline silicon carbide, Ph.D. thesis (2022). Huang et al. (2003) ↑ X. Huang, C. Zorman, M ...

Monocrystalline Silicon Carbide Disk Resonators on Phononic ...

... resonators fabricated at wafer-level, and reports on ultra-high quality-factors (Q) in gyroscopic-mode disk resonators. The SiC disk resonators are anchored ...